High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures - ScienceDirect

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Enhanced metal assisted etching method for high aspect ratio

Micromachines, Free Full-Text

Multilevel deep etching in silicon

Optimization of deep reactive ion etching for microscale silicon

High aspect ratio silicon ring-shape micropillars fabricated by

Enhanced metal assisted etching method for high aspect ratio

Wet scandium etching for hard mask formation on a silicon

Figure 1 from Wafer-scale patterning of sub-40 nm diameter and high aspect ratio (>50:1) silicon pillar arrays by nanoimprint and etching

Glass based micro total analysis systems: Materials, fabrication

Enhanced metal assisted etching method for high aspect ratio

Schematics and scanning electron micrographs showing pre

High aspect ratio silicon ring-shape micropillars fabricated by