Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect

Polymers in conventional and alternative lithography for the fabrication of nanostructures - ScienceDirect

UV imprinting process: (a) placing PDMS mold and UV-curable

A) Mold fabrication by photolithography process: SU8 photoresist

a) Fabrication procedure of the PDMS soft mold from the Si master (A)

Soft UV Nanoimprint Lithography and Its Applications

Polymers, Free Full-Text

PDF) Nanoimprint Lithography

Polymers in conventional and alternative lithography for the fabrication of nanostructures - ScienceDirect

Micromachines, Free Full-Text

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Fabrication of MOSFETs by 3D soft UV-nanoimprint - ScienceDirect

Continuous roller nanoimprinting: next generation lithography - Nanoscale (RSC Publishing) DOI:10.1039/D2NR06380H